HALO Max QCL™ CO2
Description
CRDS LASER-BASED ANALYZER
EXPANDING OPTICAL CONTAMINANT DETECTION CAPABILITIES FOR SEMICONDUCTOR MANUFACTURING
Utilizing mid-infrared Quantum Cascade Lasers (QCLs), our new TIGER OPTICS™ HALO Max QCL™ CO2 allows dramatic decreases in detection limits for certain molecules. The HALO Max QCL CO2 for ppt-level carbon dioxide detection, is based on our latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.
Introducing the HALO Max QCL CO2 for ppt-level carbon dioxide detection, it is based on our latest Max platform, offers exceptional speed and further improved usability in an all-inclusive and robust package. The analyzer is fast to install, offers continuous, real-time detection, and is easy to use and effortless to maintain, with built-in zero verification and zero drift.
The HALO Max QCL CO2 perfectly complements our HALO KA Max series (for H2O, NH3 and CH4), the Halo OK (for O2) and our other QCL-based analyzer, the Halo Max QCL CO to utilize the advantages of CRDS for detection of a large variety of critical trace impurities.
OUR FIRST ANALYZER SERIES BASED ON QUANTUM CASCADE LASER CAVITY RING-DOWN SPECTROSCOPY (QCL-CRDS), THE HALO MAX QCL CO2 OFFERS:
- Parts-per-trillion (ppt) detection capability for carbon dioxide (CO2) in UHP bulk gases
- Incorporates mid-infrared QCL technology to achieve the ultimate sensitivity
- Absolute measurement (freedom from calibration)
- Excellent speed of response at ppb levels and below
- Continuous measurement—no batch processing typical with GCs
- Robust design & maximum ease of use
APPLICATIONS
DETECTION CAPABILITY
| Detection and Matrix | Range | LDL* (3σ) | Precision (1σ) @ zero |
|---|---|---|---|
| CO2 in N2 | 0 – 2.5 ppm | 100 ppt | 35 ppt |
| CO2 in He | 0 – 2 ppm | 90 ppt | 30 ppt |
| CO2 in Ar | 0 – 2 ppm | 80 ppt | 25 ppt |
| CO2 in H2 | 0 – 4 ppm | 180 ppt | 60 ppt |
| CO2 in O2 | 0 – 2 ppm | 90 ppt | 30 ppt |
| CO2 in Clean Dry Air (CDA) | 0 – 2.5 ppm | 100 ppt | 35 ppt |
*Due to the high abundance of CO2 in air, purging of the analyzer housing is required to achieve specified LDL (see brochure for purge gas requirements)
SPECIFICATIONS
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection Limit (LDL) | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 1 minute to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 6 − 125 psig (1.4 − 9.6 bara) |
| Flow rate | <1 slpm in N2 (gas dependent) |
| Sample gases | Most inert and passive gases |
| Gas temperature | Up to 60°C |
| Purge gas | Inert gas (e.g. N2), <1 ppm CO2, 30 − 150 psig, 4 − 5 slpm |
| Purge gas connection | 1/8″ Swagelok® |
| Dimensions, H x W x D | |
| Standard sensor | 8.75″ x 19.0″ x 25.0″ (222 mm x 483 mm x 635 mm) |
| Weight | |
| Standard sensor | 60 lbs (27 kg) |
| Electrical and Interfaces | |
| Platform | Max series analyzer |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 100 Watts max. |
| Signal output | Isolated 4−20 mA |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485, Modbus TCP (optional) | |
| Data storage | Internal or external flash drive |
| Certification | CE Mark |
| Patents | |
| U.S. Patent #7,277,177 | |
